14 December 2016 Highly sensitive two-channel laser acoustic sensor
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Proceedings Volume 10176, Asia-Pacific Conference on Fundamental Problems of Opto- and Microelectronics; 1017616 (2016) https://doi.org/10.1117/12.2268125
Event: Asia-Pacific Conference on Fundamental Problems of Opto- and Microelectronics, 2016, Khabarovsk, Russia
Abstract
In this work, we present two-channel system for detecting acoustic waves which is based on adaptive holographic interferometer using multi-wave mixing in photorefractive crystal. Micromechanical silicon cantilevers with dimensions of 233×45×4 μm3 mounted on metal membrane are used as sensitive elements. For the first cantilever the detection threshold of acoustic pressure of the sensor on frequency of 6.9 kHz is 17 mPa. For the second cantilever the detection threshold of acoustic pressure of the sensor on frequency of 8 kHz is 49 mPa.
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Roman V. Romashko, Timofey A. Efimov, Yury N. Kulchin, "Highly sensitive two-channel laser acoustic sensor", Proc. SPIE 10176, Asia-Pacific Conference on Fundamental Problems of Opto- and Microelectronics, 1017616 (14 December 2016); doi: 10.1117/12.2268125; https://doi.org/10.1117/12.2268125
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