3 May 2017 Novel vacuum packaged 384×288 broadband bolometer FPA with enhanced absorption in 3-14μm wavelength range
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Abstract
This paper reports on the development of a fully packaged focal plane array of broadband microbolometers. The detector makes use of a gold black thin film to expand its absorption range from 3 to 14 μm. A low temperature packaging process was developed to minimize sintering of the gold black absorber during vacuum sealing of the bolometer array package. The gold black absorber was also laser trimmed to prevent lateral diffusion of heat and promote a better MTF. The resulting FPAs show a NETD lower than 25 mK at a frame rate of 50 Hz
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Bruno Fisette, Bruno Fisette, Mathieu Tremblay, Mathieu Tremblay, Hassane Oulachgar, Hassane Oulachgar, Francis Généreux, Francis Généreux, David Béland, David Béland, Patrick Beaupré, Patrick Beaupré, Christian Julien, Christian Julien, David Gay, David Gay, Sébastien Deshaies, Sébastien Deshaies, Marc Terroux, Marc Terroux, Bruno Tremblay, Bruno Tremblay, Denis Dufour, Denis Dufour, Christine Alain, Christine Alain, } "Novel vacuum packaged 384×288 broadband bolometer FPA with enhanced absorption in 3-14μm wavelength range", Proc. SPIE 10177, Infrared Technology and Applications XLIII, 101771R (3 May 2017); doi: 10.1117/12.2255747; https://doi.org/10.1117/12.2255747
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