27 February 1989 Laser-Gyro Mirrors Of Differing Layer Structure
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Proceedings Volume 1019, Thin Film Technologies III; (1989) https://doi.org/10.1117/12.950033
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany
Abstract
High reflectance low-scatter mirrors have been developed for laser-gyro applications. Different types of multilayer systems: Ti02/Si02, Ag/Ti02/Si02, and Ta205/Si02 combinations were investigated. In the first system TiO2 was rf-sputtered while Si02 was electron-gun evaporated. The best results were achieved for these materials with 21 alternating λ /4 layers. In the second system a thin silver film was rf-sputtered as a first layer on the substrate. Ten additional dielectric layers on the silver base were deposited to reach the same reflectivity as with pure dielectric mirrors. In the third system both Ta205 and Si02 were electron-gun evaporated. The best quality was achieved with 29 alternating layers. The mirrors of Ti02/Si02 and Ag/Ti02/Si02 exhibited no shift of the center wave length after exposition to air, while the mirrors of Ta205 /Si02 showed a shift of 30 nm. The mirrors were investigated in terms of reflectivity and scattering using an ultraprecise measurement equipment. Scattering was measured in an Ulbricht integrating sphere; resolution: 0.2-10-6 . Reflectivity measurements were carried out in a special developed reflectometer; resolution: 10.10-6.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dirk-Roger Schmitt, Dirk-Roger Schmitt, } "Laser-Gyro Mirrors Of Differing Layer Structure", Proc. SPIE 1019, Thin Film Technologies III, (27 February 1989); doi: 10.1117/12.950033; https://doi.org/10.1117/12.950033
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