27 February 1989 Stability Of The Spectral Characteristics Of Ion Plated Interference Filters
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Proceedings Volume 1019, Thin Film Technologies III; (1989) https://doi.org/10.1117/12.950035
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany
Abstract
Ta205/Si02, Zr02/SiO2 and TiO2/SiO2 multilayer optical interference filters were deposited in a Balzers2BAP 800 coatiftg plant by reactive low-voltage ion plating. The spectral filter characteristics were investigated with respect to time and temperature. The observed stability is correlated to the water and hydrogen contents. The temperature derivatives of the refractive index of TiO2, ZrO2 and Ta205 were estimated.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Johannes Edlinger, Johannes Edlinger, Jurgen Ramm, Jurgen Ramm, Hans K. Pulker, Hans K. Pulker, } "Stability Of The Spectral Characteristics Of Ion Plated Interference Filters", Proc. SPIE 1019, Thin Film Technologies III, (27 February 1989); doi: 10.1117/12.950035; https://doi.org/10.1117/12.950035
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