ArF Excimer Laser Ablation Of Mercury Cadmium Telluride Semiconductor (MCT)

Philippe Gaucherel; Alain Azema; Jean Botineau; Jean-Claude Roustan

doi:10.1117/12.950113

10 April 1989 ArF Excimer Laser Ablation Of Mercury Cadmium Telluride Semiconductor (MCT)

Philippe Gaucherel, Alain Azema, Jean Botineau, Jean-Claude Roustan

Author Affiliations +

Proceedings Volume 1022, Laser Assisted Processing; (1989) https://doi.org/10.1117/12.950113
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

A UV photoablation method with an ArF excimer laser has been experimented on Mercury Cadmium Telluride alloys. We have investigated etching rate, surface quality and surface composition under several experimental conditions. We have also obtained linear photoablated grooves by sample scanning which could be a first step to convert planar into strip waveguides.

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Philippe Gaucherel, Alain Azema, Jean Botineau, and Jean-Claude Roustan "ArF Excimer Laser Ablation Of Mercury Cadmium Telluride Semiconductor (MCT)", Proc. SPIE 1022, Laser Assisted Processing, (10 April 1989); https://doi.org/10.1117/12.950113

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