10 April 1989 ArF Excimer Laser Ablation Of Mercury Cadmium Telluride Semiconductor (MCT)
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Proceedings Volume 1022, Laser Assisted Processing; (1989) https://doi.org/10.1117/12.950113
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany
Abstract
A UV photoablation method with an ArF excimer laser has been experimented on Mercury Cadmium Telluride alloys. We have investigated etching rate, surface quality and surface composition under several experimental conditions. We have also obtained linear photoablated grooves by sample scanning which could be a first step to convert planar into strip waveguides.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Philippe Gaucherel, Philippe Gaucherel, Alain Azema, Alain Azema, Jean Botineau, Jean Botineau, Jean-Claude Roustan, Jean-Claude Roustan, } "ArF Excimer Laser Ablation Of Mercury Cadmium Telluride Semiconductor (MCT)", Proc. SPIE 1022, Laser Assisted Processing, (10 April 1989); doi: 10.1117/12.950113; https://doi.org/10.1117/12.950113
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