Hydrogenated Amorphous Silicon Films Deposited By CO[sub]2[/sub] Laser Induced Decomposition Of Silane

P. Gonzalez; M. D. Fernandez; B. Leon; M. Perez-Amor

doi:10.1117/12.950108

10 April 1989 Hydrogenated Amorphous Silicon Films Deposited By CO₂ Laser Induced Decomposition Of Silane

P. Gonzalez, M. D. Fernandez, B. Leon, M. Perez-Amor

Proceedings Volume 1022, Laser Assisted Processing; (1989) https://doi.org/10.1117/12.950108
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

First results obtained by laser-induced chemical vapour deposition of hydrogenated amorphous silicon films are reported. Processing conditions are determined for production of films suitable to be used in photovoltaic applications.

Citation Download Citation

P. Gonzalez, M. D. Fernandez, B. Leon, and M. Perez-Amor "Hydrogenated Amorphous Silicon Films Deposited By CO₂ Laser Induced Decomposition Of Silane", Proc. SPIE 1022, Laser Assisted Processing, (10 April 1989); https://doi.org/10.1117/12.950108

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