10 April 1989 Laser-Induced Metal Deposition From The Liquid Phase
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Proceedings Volume 1022, Laser Assisted Processing; (1989) https://doi.org/10.1117/12.950103
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany
Abstract
A process is described to selectively deposit metal tracks from ammoniacal metal salt solutions. The substrate is locally heated using a 5W CW Ar+ laser. At the irradiated area, the NH3 is thermally decomposed. The liberated electrons reduce the metal ions to the corresponding metal. Simultaneously, the focused laser beam induces local boiling phenomena, leading to a stationary jet flow with extremely efficient replenishment of reactants and correspondingly high deposition rates. In this way, Pd tracks 20 μm wide and 10 μm high have been grown at a lateral rate of 500μm s-1. At present, the process is used to rewire integrated circuits, to facilitate testing and failure analysis.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Andre M. T. P. van der Putten, Andre M. T. P. van der Putten, Jan W. M. Jacobs, Jan W. M. Jacobs, Jan M. G. Rikken, Jan M. G. Rikken, Kees G. C. de Kort, Kees G. C. de Kort, } "Laser-Induced Metal Deposition From The Liquid Phase", Proc. SPIE 1022, Laser Assisted Processing, (10 April 1989); doi: 10.1117/12.950103; https://doi.org/10.1117/12.950103
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