Polarized metrology systems (Conference Presentation)

Rongguang Liang

doi:10.1117/12.2264881

6 June 2017 Polarized metrology systems (Conference Presentation)

Rongguang Liang

Proceedings Volume 10220, Dimensional Optical Metrology and Inspection for Practical Applications VI; 1022002 (2017) https://doi.org/10.1117/12.2264881
Event: SPIE Commercial + Scientific Sensing and Imaging, 2017, Anaheim, CA, United States

Abstract

Polarization is a unique property of light, providing a number of advantages in optical metrology. In this talk, I will discuss principles and experimental results of polarization techniques in fringe project metrology and interferometric measurement.

Conference Presentation

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Rongguang Liang "Polarized metrology systems (Conference Presentation)", Proc. SPIE 10220, Dimensional Optical Metrology and Inspection for Practical Applications VI, 1022002 (6 June 2017); https://doi.org/10.1117/12.2264881

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KEYWORDS

Metrology

Polarization

Optical metrology

Interferometry

Current controlled current source

Inspection

Optical inspection

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