Measuring optical phase digitally in coherent metrology systems

Damien P. Kelly; James Ryle; Liang Zhao; John T. Sheridan

doi:10.1117/12.2262485

1 May 2017 Measuring optical phase digitally in coherent metrology systems

Damien P. Kelly, James Ryle, Liang Zhao, John T. Sheridan

Author Affiliations +

Proceedings Volume 10220, Dimensional Optical Metrology and Inspection for Practical Applications VI; 102200B (2017) https://doi.org/10.1117/12.2262485
Event: SPIE Commercial + Scientific Sensing and Imaging, 2017, Anaheim, California, United States

Abstract

The accurate measurement of optical phase has many applications in metrology. For biological samples, which appear transparent, the phase data provides information about the refractive index of the sample. In speckle metrology, the phase can be used to estimate stress and strains of a rough surface with high sensitivity. In this theoretical manuscript we compare and contrast the properties of two techniques for estimating the phase distribution of a wave field under the paraxial approximation: (I) A digital holographic system, and (II) An idealized phase retrieval system. Both systems use a CCD or CMOS array to measure the intensities of the wave fields that are reflected from or transmitted through the sample of interest. This introduces a numerical aspect to the problem. For the two systems above we examine how numerical calculations can limit the performance of these systems leading to a near-infinite number of possible solutions.

Conference Presentation

Citation Download Citation

Damien P. Kelly, Damien P. Kelly, James Ryle, James Ryle, Liang Zhao, Liang Zhao, John T. Sheridan, John T. Sheridan, } "Measuring optical phase digitally in coherent metrology systems", Proc. SPIE 10220, Dimensional Optical Metrology and Inspection for Practical Applications VI, 102200B (1 May 2017); doi: 10.1117/12.2262485; https://doi.org/10.1117/12.2262485

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