6 June 2017 On-machine metrology system (Conference Presentation)
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Abstract
Diamond turning is the powerful fabrication method for optics. Current process is very time consuming due to the lack of on-machine metrology. In this talk, we will first discuss the challenges and requirement of in-situ metrology, then we will present chromatic confocal on-machine metrology system developed in our lab and demonstrate its performance.
Conference Presentation
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Hsiang Nan Cheng, Hsiang Nan Cheng, Katherine Overend, Katherine Overend, Yu Zhang, Yu Zhang, Rongguang Liang, Rongguang Liang, } "On-machine metrology system (Conference Presentation)", Proc. SPIE 10220, Dimensional Optical Metrology and Inspection for Practical Applications VI, 102200G (6 June 2017); doi: 10.1117/12.2264882; https://doi.org/10.1117/12.2264882
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