30 December 2016 Optical coefficients of nanometer-thick copper and gold films in microwave frequency range
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Proceedings Volume 10224, International Conference on Micro- and Nano-Electronics 2016; 1022407 (2016) https://doi.org/10.1117/12.2266504
Event: The International Conference on Micro- and Nano-Electronics 2016, 2016, Zvenigorod, Russian Federation
Abstract
Ultrathin (1–10 nm) Cu and Au films were prepared on the silicon and quartz substrates by magnetron sputtering at room temperature. We measured the transmission coefficient of the films at a wavelength of 3cm and analyzed a surface morphology of these films. It was shown that the films with thicknesses less than 7.5 nm (Au) and 3 nm (Cu) are almost transparent for microwaves. This effect is explained by quick oxidation of Cu and the complex surface morphology of nanometer thick films. The Au film morphology is evolved with increasing average Au thickness d from hemispherical islands initially (1.0 nm<d<5.0 nm) to partially coalesced worm-like island structures (d=10 nm).
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I. Khorin, N. Orlikovsky, A. Rogozhin, A. Tatarintsev, S. Pronin, V. Andreev, V. Vdovin, "Optical coefficients of nanometer-thick copper and gold films in microwave frequency range", Proc. SPIE 10224, International Conference on Micro- and Nano-Electronics 2016, 1022407 (30 December 2016); doi: 10.1117/12.2266504; https://doi.org/10.1117/12.2266504
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