Simulation of heavy charged particles damage on MEMS

V. Shakhnov; A. Glushko; V. Makarchuk; L. Zinchenko; V. Terekhov; S. Mikhaylichenko

doi:10.1117/12.2266750

30 December 2016 Simulation of heavy charged particles damage on MEMS

V. Shakhnov, A. Glushko, V. Makarchuk, L. Zinchenko, V. Terekhov, S. Mikhaylichenko

Proceedings Volume 10224, International Conference on Micro- and Nano-Electronics 2016; 102241C (2016) https://doi.org/10.1117/12.2266750
Event: The International Conference on Micro- and Nano-Electronics 2016, 2016, Zvenigorod, Russian Federation

Abstract

The paper presents computer simulation results of heavy charged particles radiation effect on elements of electrostatic microelectromechanical systems. Modeling methods of heavy charged particles impact on MEMS elements were envisaged. The radiation sensitivity of different types of fractal electrostatic MEMS were evaluated. Methods of reduction of radiation impact on electrostatic MEMS based on fractal theory were discussed. Conclusions about fractal electrostatic MEMS features were outlined.

Citation Download Citation

V. Shakhnov, A. Glushko, V. Makarchuk, L. Zinchenko, V. Terekhov, and S. Mikhaylichenko "Simulation of heavy charged particles damage on MEMS", Proc. SPIE 10224, International Conference on Micro- and Nano-Electronics 2016, 102241C (30 December 2016); https://doi.org/10.1117/12.2266750

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