Anchored multi-DOF MEMS gyroscope having robust drive mode

Payal Verma; S. N. Khonina; V. S. Pavelyev; S. A. Fomchenkov; B. V. Uma

doi:10.1117/12.2267115

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30 December 2016 Anchored multi-DOF MEMS gyroscope having robust drive mode

Payal Verma, S. N. Khonina, V. S. Pavelyev, S. A. Fomchenkov, B. V. Uma

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Proceedings Volume 10224, International Conference on Micro- and Nano-Electronics 2016; 102241D (2016) https://doi.org/10.1117/12.2267115
Event: The International Conference on Micro- and Nano-Electronics 2016, 2016, Zvenigorod, Russian Federation

Abstract

This paper presents the new architecture of 2-DOF (degree-of-freedom) drive mode and 1-DOF sense mode gyroscope with the concept of additional anchoring that retains all the advantages of the Dynamic Vibration Absorber (DVA) concept while being operated at high frequencies. These concepts allow reduction of the bandwidth by varying the coupling parameter during the design, thereby increasing the mechanical sensitivity. In the present design, the anchoring concept has been implemented by adding a central anchor for the sense mass. The steady state response and design concept have been devised using analytical modeling.

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Payal Verma, S. N. Khonina, V. S. Pavelyev, S. A. Fomchenkov, and B. V. Uma "Anchored multi-DOF MEMS gyroscope having robust drive mode", Proc. SPIE 10224, International Conference on Micro- and Nano-Electronics 2016, 102241D (30 December 2016); https://doi.org/10.1117/12.2267115

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