30 December 2016 The simulation model of planar electrochemical transducer
Author Affiliations +
Proceedings Volume 10224, International Conference on Micro- and Nano-Electronics 2016; 102241I (2016) https://doi.org/10.1117/12.2267082
Event: The International Conference on Micro- and Nano-Electronics 2016, 2016, Zvenigorod, Russian Federation
Abstract
Planar electrochemical systems are very perspective to build modern motion and pressure sensors. Planar microelectronic technology is successfully used for electrochemical transducer of motion parameters. These systems are characterized by an exceptionally high sensitivity towards mechanic exposure due to high rate of conversion of the mechanic signal to electric current. In this work, we have developed a mathematical model of this planar electrochemical system, which detects the mechanical signals. We simulate the processes of mass and charge transfer in planar electrochemical transducer and calculated its transfer function with different geometrical parameters of the system.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
D. A. Zhevnenko, D. A. Zhevnenko, S. S. Vergeles, S. S. Vergeles, T. V. Krishtop, T. V. Krishtop, D. V. Tereshonok, D. V. Tereshonok, E. S. Gornev, E. S. Gornev, V. G. Krishtop, V. G. Krishtop, } "The simulation model of planar electrochemical transducer", Proc. SPIE 10224, International Conference on Micro- and Nano-Electronics 2016, 102241I (30 December 2016); doi: 10.1117/12.2267082; https://doi.org/10.1117/12.2267082
PROCEEDINGS
10 PAGES


SHARE
Back to Top