The planar silicon-based microelectronic technology for electrochemical transducers

A. V. Novikov; A. E. Egorchikov; A. N. Dolgov; E. S. Gornev; V. G. Popov; I. V. Egorov; V. G. Krishtop

doi:10.1117/12.2267095

30 December 2016 The planar silicon-based microelectronic technology for electrochemical transducers

A. V. Novikov, A. E. Egorchikov, A. N. Dolgov, E. S. Gornev, V. G. Popov, I. V. Egorov, V. G. Krishtop

Proceedings Volume 10224, International Conference on Micro- and Nano-Electronics 2016; 102241J (2016) https://doi.org/10.1117/12.2267095
Event: The International Conference on Micro- and Nano-Electronics 2016, 2016, Zvenigorod, Russian Federation

Abstract

We have developed the new technology for production of sensitive modules for electrochemical sensors of pressure and acceleration. The technology is applicable for mass production and scalable for high-volume production. In this work we demonstrate the new sensing module for electrochemical motion sensors, and its possibility of applying in geophones. We fabricated prototypes of electrochemical planar transducer chips, produced a laboratory prototype of a geophone based on our planar transducer chip, and tested them. This paper presents the preliminary results of the tests.

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A. V. Novikov, A. E. Egorchikov, A. N. Dolgov, E. S. Gornev, V. G. Popov, I. V. Egorov, and V. G. Krishtop "The planar silicon-based microelectronic technology for electrochemical transducers", Proc. SPIE 10224, International Conference on Micro- and Nano-Electronics 2016, 102241J (30 December 2016); https://doi.org/10.1117/12.2267095

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