30 December 2016 3D simulation of silicon micro-ring resonator with Comsol
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Proceedings Volume 10224, International Conference on Micro- and Nano-Electronics 2016; 102241L (2016) https://doi.org/10.1117/12.2266783
Event: The International Conference on Micro- and Nano-Electronics 2016, 2016, Zvenigorod, Russian Federation
Abstract
In this paper we provide 3d full-vector static electromagnetic simulation of silicon micro-ring resonator operating. We show that geometrical and scalar approaches are not sufficiently accurate for calculating resonator parameters. Quite strong dependence of ring resonator radius on waveguide width is revealed.
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S. A. Degtyarev, S. A. Degtyarev, V. V. Podlipnov, V. V. Podlipnov, Payal Verma, Payal Verma, S. N. Khonina, S. N. Khonina, } "3D simulation of silicon micro-ring resonator with Comsol", Proc. SPIE 10224, International Conference on Micro- and Nano-Electronics 2016, 102241L (30 December 2016); doi: 10.1117/12.2266783; https://doi.org/10.1117/12.2266783
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