30 December 2016 Electro-optical converter of zero-order and second-order Bessel laser beams for the photolithography systems
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Proceedings Volume 10224, International Conference on Micro- and Nano-Electronics 2016; 102241M (2016) https://doi.org/10.1117/12.2264691
Event: The International Conference on Micro- and Nano-Electronics 2016, 2016, Zvenigorod, Russian Federation
Abstract
The electro-optical element for converting of zero-order and second-order Bessel laser beams based on strontium – barium niobate crystal has been developed. The theoretical research of electrically tunable beam switching has been carried out for various diffractive axicons with periods 1.3 μm, 2 μm, 4 μm and a crystal with 9.7 mm length. The research showed maximum sensitivity of output beam intensity for axicon period 1.3 μm. The calculated switching voltage for this case was about 800 V.
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V. D. Paranin, S. N. Khonina, "Electro-optical converter of zero-order and second-order Bessel laser beams for the photolithography systems", Proc. SPIE 10224, International Conference on Micro- and Nano-Electronics 2016, 102241M (30 December 2016); doi: 10.1117/12.2264691; https://doi.org/10.1117/12.2264691
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