Features of local anodic oxidation process

A. Belov; Yu. Chaplygin; S. Lemeshko; I. Sagunova; V. Shevyakov

doi:10.1117/12.2264436

30 December 2016 Features of local anodic oxidation process

A. Belov, Yu. Chaplygin, S. Lemeshko, I. Sagunova, V. Shevyakov

Proceedings Volume 10224, International Conference on Micro- and Nano-Electronics 2016; 102241Q (2016) https://doi.org/10.1117/12.2264436
Event: The International Conference on Micro- and Nano-Electronics 2016, 2016, Zvenigorod, Russian Federation

Abstract

The article dwells upon theoretical considerations on the nature of probe local anodic oxidation. The concept of the process presented here allows for the device intrinsic amperage limitations in the tip-sample system. The work also demonstrates characteristics of height-modulated dielectric mask formation on the solid-state surfaces.

Citation Download Citation

A. Belov, Yu. Chaplygin, S. Lemeshko, I. Sagunova, and V. Shevyakov "Features of local anodic oxidation process", Proc. SPIE 10224, International Conference on Micro- and Nano-Electronics 2016, 102241Q (30 December 2016); https://doi.org/10.1117/12.2264436

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