30 December 2016 Optical emission 2D-tomography of plasma: case of rectangular two-view scanning and diagonal symmetry of inhomogeneities
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Proceedings Volume 10224, International Conference on Micro- and Nano-Electronics 2016; 102242D (2016) https://doi.org/10.1117/12.2266838
Event: The International Conference on Micro- and Nano-Electronics 2016, 2016, Zvenigorod, Russian Federation
Abstract
The case of the diagonal symmetry of plasma inhomogeneities scanned at two-view emission tomography was investigated. Original method for 2D-tomographic reconstruction utilizing analytical description of local inhomogeneities of the spatial distribution of the density of neutral and charged plasma particles on the chamber cross section was improved.
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A. V. Fadeev, K. V. Rudenko, "Optical emission 2D-tomography of plasma: case of rectangular two-view scanning and diagonal symmetry of inhomogeneities", Proc. SPIE 10224, International Conference on Micro- and Nano-Electronics 2016, 102242D (30 December 2016); doi: 10.1117/12.2266838; https://doi.org/10.1117/12.2266838
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