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26 April 1989 ArF* And Ar2F* Excimer Systems
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Proceedings Volume 1023, Excimer Lasers and Applications; (1989) https://doi.org/10.1117/12.950128
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany
Abstract
The effect of the addition of Ne as a buffer gas to an Ar/F2 laser gas mixture was studied in two different systems. With the largest device the total output energy was optimized, in the smaller system the pressure dependency of the addition of the Ne was studied. Futhermore the fluorescence signals of ArF* and Ar2F* were recorded as a function of the excitation length and pumping intensity.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Peter J. Peters, Bert M. Bastiaens, Umberto del Bello, and Wim J. Witteman "ArF* And Ar2F* Excimer Systems", Proc. SPIE 1023, Excimer Lasers and Applications, (26 April 1989); https://doi.org/10.1117/12.950128
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