26 April 1989 Excimer Lasers And Geometric Optics
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Proceedings Volume 1023, Excimer Lasers and Applications; (1989) https://doi.org/10.1117/12.950138
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany
The beam properties of a typical excimer laser with plane parallel mirrors can be approximately described from the geometric optics point of view as a superposition of ray bundles with locally varying angular distributions. These distributions have been measured by recording the far-field intensity after a small aperture shifted transversally through the beam. The characteristic differences to the situation at e.g. an incoherent source and an ideal laser with a stable resonator and the consequences for imaging are discussed within this framework.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Klaus Schildbach, Klaus Schildbach, } "Excimer Lasers And Geometric Optics", Proc. SPIE 1023, Excimer Lasers and Applications, (26 April 1989); doi: 10.1117/12.950138; https://doi.org/10.1117/12.950138


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