Excimer Lasers With Capacitively Excited Tubular Discharges

Hans J. Eichler; Helmut Herweg; Jose de la Rosa

doi:10.1117/12.950126

26 April 1989 Excimer Lasers With Capacitively Excited Tubular Discharges

Hans J. Eichler, Helmut Herweg, Jose de la Rosa

Proceedings Volume 1023, Excimer Lasers and Applications; (1989) https://doi.org/10.1117/12.950126
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

The excitation of excimer lasers in tubular discharges results in simple and compact devices needing no preionization. Optical output energies are in the millijoule range. We investigated XeF, KrF and ArF lasers for various operating conditions. The lasers consist of capillary glass tubes with two internal electrodes at the ends and an aluminium-foil wrapped around the tube as capacitive electrode. A maximum output energy of 0.3 mJ has been achieved for the XeF laser. The good quality of the discharge is indicated by the observation of spontaneous mode locking. The detailed study of the discharge for different polarities of the electrodes has shown that efficient operation with a high gas lifetime can be obtained by a purely capacitively excited discharge. A gas lifetime of about 10,000 pulses for 3 litres gas mixture has been observed. Using a two stage Marx generator to generate 100 kV excitation voltage a maximum output energy of 0.7 mJ was obtained for a gas mixture of Kr, F2 and He with an efficiency of 0.17%. The KrF laser operates also without the buffer gas. Laser action in ArF has been achieved with 15 μJ pulse energy and 10 ns duration.

Citation Download Citation

Hans J. Eichler, Helmut Herweg, and Jose de la Rosa "Excimer Lasers With Capacitively Excited Tubular Discharges", Proc. SPIE 1023, Excimer Lasers and Applications, (26 April 1989); https://doi.org/10.1117/12.950126

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