The bandwidth of most excimer lasers allows the amplification of subpicosecond pulses. In this paper a novel method and experimental arrangement is reported for the generation of femtosecond pulses in the XeF, XeC1 and KrF laser wavelengths. This is based on the use of a hybrid excimer-dye laser arrangement, incorporating a twin tube excimer laser and a subpicosecond dye laser setup. With additional pulse compression, the shortest pulse durations obtained are 560 fs, 170 fs and 45 fs - with 1 mJ, 5 mJ and 4 mJ pulse energy - for the above mentioned three excimers, respectively. The study of the gain dynamics for the XeF, XeC1 and KrF laser transitions showed that only 22%, 38% and 75% of the stored energy can be extracted by a subpic9second pulse. The saturation energy density was measured to be 0.2 mJ/cm2, 0.85 mJ/cm z and 2.0 mJ/cm2, respectively.