High Power Excimer Laser: First Results

P. Oesterlin; W. MUckenheim; D. Basting

doi:10.1117/12.950125

26 April 1989 High Power Excimer Laser: First Results

P. Oesterlin, W. MUckenheim, D. Basting

Proceedings Volume 1023, Excimer Lasers and Applications; (1989) https://doi.org/10.1117/12.950125
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

Excimer lasers emitting more than 200 W output power are not commercially available. A significant increase requires new technological efforts with respect to both the gas circulation and the discharge system. A due research project has yielded a laser which emits 0.5 kW at 308 nm when being UV preionized and operated at a repetition rate of 300 Hz. The laser, which is capable of operating at 500 Hz, can be equipped with an X-ray preionization module. After completing this project 1 kW output power will be available.

Citation Download Citation

P. Oesterlin, W. MUckenheim, and D. Basting "High Power Excimer Laser: First Results", Proc. SPIE 1023, Excimer Lasers and Applications, (26 April 1989); https://doi.org/10.1117/12.950125

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