26 April 1989 High Power Excimer Laser: First Results
Author Affiliations +
Proceedings Volume 1023, Excimer Lasers and Applications; (1989) https://doi.org/10.1117/12.950125
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany
Excimer lasers emitting more than 200 W output power are not commercially available. A significant increase requires new technological efforts with respect to both the gas circulation and the discharge system. A due research project has yielded a laser which emits 0.5 kW at 308 nm when being UV preionized and operated at a repetition rate of 300 Hz. The laser, which is capable of operating at 500 Hz, can be equipped with an X-ray preionization module. After completing this project 1 kW output power will be available.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
P. Oesterlin, P. Oesterlin, W. MUckenheim, W. MUckenheim, D. Basting, D. Basting, } "High Power Excimer Laser: First Results", Proc. SPIE 1023, Excimer Lasers and Applications, (26 April 1989); doi: 10.1117/12.950125; https://doi.org/10.1117/12.950125


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