26 April 1989 High Repetition Rate High Power Excimer Lasers
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Proceedings Volume 1023, Excimer Lasers and Applications; (1989) https://doi.org/10.1117/12.950120
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany
We report on the development of high repetition rate, high average power excimer laser systems with projected repetition rates of several kHz and multi kilowatt outputs. An optimized system concept has been derived by theoretically and experimentally comparing the various system options. Preliminary results are presented for a compact spark-preionized KrF and XeC1 excimer laser system operating at repetition rates of up to 800 Hz and being capable of average output powers of more than 300 W. The laser is excited by a single-thyratron switched LC-inversion circuit, utilizing single or double stage pulse compression.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hubertus M. von Bergmann, Gordon L. Bredenkamp, and Piet H. Swart "High Repetition Rate High Power Excimer Lasers", Proc. SPIE 1023, Excimer Lasers and Applications, (26 April 1989); doi: 10.1117/12.950120; https://doi.org/10.1117/12.950120


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