26 April 1989 Numbers Of Merit In Excimer Laser Reliability Analysis
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Proceedings Volume 1023, Excimer Lasers and Applications; (1989) https://doi.org/10.1117/12.950137
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany
Abstract
Recent results confirm new advances in XeC1 excimer laser discharge design have achieved major milestones in reliability - 1010 pulses without replacing the thyratron, electrodes, capacitors or power supply. Other data on standard KrF excimer lasers allow statistical analysis of numbers of merit, including MTBF and maintenance intervals. Projections are made of operating costs and maintenance for both continuous operation and low duty cycle of two different size lasers with all major gases: XeCl, KrF and ArF.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lindsay Austin, Lindsay Austin, Dirk Basting, Dirk Basting, Hans-Jurgen Kahlert, Hans-Jurgen Kahlert, Ulrich Rebhan, Ulrich Rebhan, Wolfgang Muckenheim, Wolfgang Muckenheim, "Numbers Of Merit In Excimer Laser Reliability Analysis", Proc. SPIE 1023, Excimer Lasers and Applications, (26 April 1989); doi: 10.1117/12.950137; https://doi.org/10.1117/12.950137
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