This paper describes the development of a control and monitoring system for a high power excimer laser within the framework of the joint European research project called EUREKA. As very high power excimer lasers become more attractive for industrial use, it is necessary to address the question of detailed monitoring and control. Remote monitoring of a variety of laser parameters, such as flow rates and flow performance is required in fast gas flow, multi-kilowatt devices, and the ability to monitor component performance over long periods of time is also desirable. Since the excimer laser environment is electromagnetically noisy, an overview of an approach that uses optical sensors and fibreoptic communication networks will be given. The paper will discuss the necessity to measure and control the timing of the laser, the gas composition, the alignment of the laser resonator, the uniformity of the discharge and the performance of the power supply. Examples of fibre optic sensor designs which could be used in the laser environment will be given. Hybrid devices with conventional sensor heads but using fibre optic communication links would be a possible short-term alternative where they would significantly outperform the all-optical solution.
A. D. Boardman,
"Optical Control Of High Power Excimer Lasers", Proc. SPIE 1023, Excimer Lasers and Applications, (26 April 1989); doi: 10.1117/12.950136; https://doi.org/10.1117/12.950136