26 April 1989 Precision Machining Of Coating Layers By Irradiation With A High Pulse Energy Excimer Laser
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Proceedings Volume 1023, Excimer Lasers and Applications; (1989) https://doi.org/10.1117/12.950149
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany
Abstract
The structured removal of coatings by excimer laser irradiation was investigated for different coating/substrate systems. High structure quality and pm dimensions were attained for polymer coatings. Coating materials which melt under irradiation, show deterioration by melt flow, reactive or alloying action with the substrate, or limited wettability, which makes cleaning difficult. But in most cases the requirement of total removal can be met by the reduction of structure quality or machining speed.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
K. J. Schmatjko, H. Durchholz, G. Endres, "Precision Machining Of Coating Layers By Irradiation With A High Pulse Energy Excimer Laser", Proc. SPIE 1023, Excimer Lasers and Applications, (26 April 1989); doi: 10.1117/12.950149; https://doi.org/10.1117/12.950149
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