16 May 2017 Experimental study of laser trimmed surface acoustic wave delay line topologies
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Abstract
Laser ablation technique is promising for production of surface acoustic wave (SAW) sensors complicated topologies. Its main advantages in comparison to a photolithography method are: simplicity in pattern creation, no need in photomasks, possible to work with thick metallization (up to 20 μm), possibility to correct topology after the sensor sealing and others. This work discusses possible error sources, including side heating of metal films, and presents results of first characteristics evaluation for experimental delay lines produced by laser technology.
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Dmitry Lukyanov, Dmitry Lukyanov, Sergey Shevchenko, Sergey Shevchenko, Alexander Kukaev, Alexander Kukaev, Daniil Safronov, Daniil Safronov, } "Experimental study of laser trimmed surface acoustic wave delay line topologies", Proc. SPIE 10231, Optical Sensors 2017, 102311T (16 May 2017); doi: 10.1117/12.2265675; https://doi.org/10.1117/12.2265675
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