16 May 2017 Tiny incident light angle sensor
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A novel device for detecting the intensity and the angles of incoming light is presented. The silicon chip with 1 mm edge length comprises a segmented photo diode with four active areas within the inclined surfaces of a deep etched cavity. Simple signal difference analysis of these signals allow for accurate azimuth and inclination measurement in the range of 0 to 360° and 0 to 55°, respectively. Using an artificial neural network (ANN) calibration strategy the operation range of inclination can be increased up to 85° with typical angle errors below 2°. In this report we present details on design, fabrication, signal analysis and calibration strategies.
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D. Mitrenga, D. Mitrenga, M. Schädel, M. Schädel, A. T. Winzer, A. T. Winzer, S. Völlmeke, S. Völlmeke, K. D. Preuß, K. D. Preuß, J. Freitag, J. Freitag, O. Brodersen, O. Brodersen, } "Tiny incident light angle sensor", Proc. SPIE 10231, Optical Sensors 2017, 102312C (16 May 2017); doi: 10.1117/12.2267135; https://doi.org/10.1117/12.2267135

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