31 May 2017 Optimization of microroughness of replicated x-ray optics
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Abstract
We report on our work of minimizing the microroughness of replicated grazing incidence X-ray optics. Ion beam and RF sputter cleaning was used as surface treatment and we compare its effects in the article. Vacuum deposition of smoothing layers was also used for minimizing the microroughness. The surfaces were measured by atomic force microscopy and X-ray reflectometry. Microroughness less than 0,5 nm RMS and Ra was achieved.
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Lenka Mikulickova, Lenka Mikulickova, Ladislav Pina, Ladislav Pina, Adolf Inneman, Adolf Inneman, Daniela Doubravova, Daniela Doubravova, Veronika Marsikova, Veronika Marsikova, Ladislav Sieger, Ladislav Sieger, Martin Urban, Martin Urban, Veronika Stehliková, Veronika Stehliková, Ondrej Nentvich, Ondrej Nentvich, Jaromir Mirovsky, Jaromir Mirovsky, } "Optimization of microroughness of replicated x-ray optics", Proc. SPIE 10235, EUV and X-ray Optics: Synergy between Laboratory and Space V, 102350A (31 May 2017); doi: 10.1117/12.2265810; https://doi.org/10.1117/12.2265810
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