17 May 2017 Soft x-ray nanoscale imaging using highly brilliant laboratory sources and new detector concepts
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Abstract
In this contribution, we report about nanoscale imaging using a laser produced plasma source based laboratory transmission X-ray microscope (LTXM) in the water window. The highly brilliant soft X-ray radiation of the LTXM is provided by a laser-produced nitrogen plasma source focused by a multilayer condenser mirror to the sample. An objective zone plate maps the magnified image of the sample on the super resolution camera. This camera employs a deep cooled soft-X-ray CCD imaging sensor sandwiched with a xy piezo stage to allow subpixel displacements of the detector. The camera is read out using a very low noise electronics platform, also directing low µm shifts of the sensor between subsequent image acquisitions. Finally an algorithm computes a high resolution image from the individual shifted low-resolution image frames.
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H. Stiel, H. Stiel, J. Braenzel, J. Braenzel, A. Dehlinger, A. Dehlinger, R. Jung, R. Jung, A. Luebcke, A. Luebcke, M. Regehly, M. Regehly, S. Ritter, S. Ritter, J. Tuemmler, J. Tuemmler, M. Schnuerer, M. Schnuerer, C. Seim, C. Seim, } "Soft x-ray nanoscale imaging using highly brilliant laboratory sources and new detector concepts", Proc. SPIE 10243, X-ray Lasers and Coherent X-ray Sources: Development and Applications, 1024309 (17 May 2017); doi: 10.1117/12.2264222; https://doi.org/10.1117/12.2264222
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