5 January 2017 Fully vertical-coupling and one-step etching subwavelength binary blazed grating coupler
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Proceedings Volume 10244, International Conference on Optoelectronics and Microelectronics Technology and Application; 102441Z (2017) https://doi.org/10.1117/12.2258710
Event: International Conference on Optoelectronics and Microelectronics Technology and Application, 2016, Shanghai, China
Abstract
We proposed a fully vertical-coupling and one-step etching subwavelength binary blazed grating (BBG) coupler with coupling efficiencies exceeding 80% at a wavelength of 1.55μm. Based on reflector grating and Bragg bottom reflector layer, the coupling efficiency gets its maximum 90% when λ is equal to 1.535μm with the 1 dB wavelength bandwidth is around 35nm. The BBG is formed with multiple rectangular pillars having different widths and uniform height, which is a kind of binary version of the triangular tooth shape of the blazed grating and can be easily fabricated by only one etching step. It is CMOS compatible and available for mass production.
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Junbo Yang, Junbo Yang, Wenjun Wu, Wenjun Wu, Jie Huang, Jie Huang, Dingbo Chen, Dingbo Chen, Jingjing Zhang, Jingjing Zhang, } "Fully vertical-coupling and one-step etching subwavelength binary blazed grating coupler", Proc. SPIE 10244, International Conference on Optoelectronics and Microelectronics Technology and Application, 102441Z (5 January 2017); doi: 10.1117/12.2258710; https://doi.org/10.1117/12.2258710
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