PROCEEDINGS VOLUME 10246
SPIE MICROTECHNOLOGIES | 8-10 MAY 2017
Smart Sensors, Actuators, and MEMS VIII
Proceedings Volume 10246 is from: Logo
SPIE MICROTECHNOLOGIES
8-10 May 2017
Barcelona, Spain
Front Matter: Volume 10246
Proc. SPIE 10246, Front Matter: Volume 10246, 1024601(27 June 2017);doi: 10.1117/12.2282023
Tuesday Plenary Session
Proc. SPIE 10246, MEMS microphone innovations towards high signal to noise ratios (Conference Presentation) (Plenary Presentation), 1024602();doi: 10.1117/12.2267872
Modeling and Simulation I
Proc. SPIE 10246, Multiscale numerical study on ferroelectric nonlinear response of PZT thin films (Conference Presentation), 1024603();doi: 10.1117/12.2265505
Proc. SPIE 10246, Fluid-structure interaction modelling of the roof tile-shaped modes in piezoelectric plate microresonators, 1024604(5 June 2017);doi: 10.1117/12.2266549
Proc. SPIE 10246, Optimal design of a microgripper-type actuator based on AlN/Si heterogeneous bimorph, 1024606(30 May 2017);doi: 10.1117/12.2266498
Proc. SPIE 10246, Topologically optimised flexure hinge based XY stage, 1024607(30 May 2017);doi: 10.1117/12.2267398
Modeling and Simulation II
Proc. SPIE 10246, Modeling high signal-to-noise ratio in a novel silicon MEMS microphone with comb readout, 1024608(30 May 2017);doi: 10.1117/12.2266014
Proc. SPIE 10246, An FE model of a cellular polypropylene: exploring mechanical properties, 1024609(31 May 2017);doi: 10.1117/12.2266265
Proc. SPIE 10246, Efficient fluid transport by a bionically inspired micro-flapper: fluidic investigations using fully coupled finite element simulation, 102460A(2 June 2017);doi: 10.1117/12.2266252
Chemical and Biochemical Sensors I
Proc. SPIE 10246, Development of a lab-on-chip electrochemical immunosensor for detection of Polycyclic Aromatic Hydrocarbons (PAH) in environmental water, 102460B(13 June 2017);doi: 10.1117/12.2265011
Proc. SPIE 10246, Gravimetric humidity sensor based on ZnO nanorods covered piezoresistive Si microcantilever, 102460C(13 June 2017);doi: 10.1117/12.2264897
Proc. SPIE 10246, MEMS-based array for hydrogen sulfide detection employing a phase transition, 102460D(13 June 2017);doi: 10.1117/12.2265743
Chemical and Biochemical Sensors II
Proc. SPIE 10246, Direct measurement for organic solvents diffusion using ultra-sensitive optical resonator, 102460E(16 June 2017);doi: 10.1117/12.2265397
Proc. SPIE 10246, Inkjet-printed dissolved oxygen and pH sensors on flexible plastic substrates, 102460F(5 June 2017);doi: 10.1117/12.2264912
Proc. SPIE 10246, Wax microfluidics light-addressable valve with multiple actuation, 102460G(30 May 2017);doi: 10.1117/12.2264919
Proc. SPIE 10246, Development of biosensors for non-invasive measurements of heart failure biomarkers in saliva, 102460H(13 June 2017);doi: 10.1117/12.2266363
Physical Sensors I
Proc. SPIE 10246, MEMS direction finding acoustic sensor, 102460I(2 June 2017);doi: 10.1117/12.2264952
Proc. SPIE 10246, A multi-functional MEMS-SPM for quantitative characterization of nano-objects, 102460J(7 June 2017);doi: 10.1117/12.2265680
Proc. SPIE 10246, Asymmetric resonance response analysis of a thermally excited silicon microcantilever for mass-sensitive nanoparticle detection, 102460K(2 June 2017);doi: 10.1117/12.2266084
Proc. SPIE 10246, Thermoelectric bolometers based on silicon membranes, 102460L(30 May 2017);doi: 10.1117/12.2266554
Physical Sensors II
Proc. SPIE 10246, Oscillator circuit for monitoring the gas damping effect of piezoelectric microresonators, 102460M(2 June 2017);doi: 10.1117/12.2266025
Proc. SPIE 10246, Comparative assessment of PVDF and PVDF-TrFE piezoelectric polymers for flexible actuators applications, 102460N(31 May 2017);doi: 10.1117/12.2266559
Proc. SPIE 10246, Thin film system with integrated load and temperature sensors for the technical application in deep drawing process, 102460O(31 May 2017);doi: 10.1117/12.2265694
Materials and Processes
Proc. SPIE 10246, Low cost nanomechanical surfaces stress based sensors fabricated by hybrid materials, 102460P(2 June 2017);doi: 10.1117/12.2264893
Proc. SPIE 10246, Zirconium diboride thin films for use in high temperature sensors and MEMS devices, 102460Q(30 May 2017);doi: 10.1117/12.2266561
Proc. SPIE 10246, FT-IR analysis of high temperature annealing effects in a-SiC:H thin films, 102460R(14 June 2017);doi: 10.1117/12.2266844
Energy Devices I
Proc. SPIE 10246, Micro solid oxide fuel cells: a new generation of micro-power sources for portable applications, 102460S(2 June 2017);doi: 10.1117/12.2269454
Proc. SPIE 10246, Alkaline fuel cell with nitride membrane, 102460T(2 June 2017);doi: 10.1117/12.2265689
Proc. SPIE 10246, Parameter identification from frequency response of MEMS energy harvesters, 102460U(2 June 2017);doi: 10.1117/12.2264094
Proc. SPIE 10246, Powering a leadless pacemaker using a PiezoMEMS energy harvester, 102460V(2 June 2017);doi: 10.1117/12.2264437
Energy Devices II
Proc. SPIE 10246, Designing, modelling and testing of vibration energy harvester with nonlinear stiffness, 102460W(30 May 2017);doi: 10.1117/12.2264769
Proc. SPIE 10246, Comparison of methods for static charge energy harvesting on aircraft, 102460X(30 May 2017);doi: 10.1117/12.2264890
Proc. SPIE 10246, Improved thermal and electrical design for an all-Si thermoelectric micropower source, 102460Y(30 May 2017);doi: 10.1117/12.2266015
Proc. SPIE 10246, Integrated TiN coated porous silicon supercapacitor with large capacitance per foot print, 102460Z(30 May 2017);doi: 10.1117/12.2266603
Interfacing and System Integration
Proc. SPIE 10246, Programmable differential capacitance-to-voltage converter for MEMS accelerometers, 1024610(31 May 2017);doi: 10.1117/12.2264784
Proc. SPIE 10246, Robust design of an inkjet-printed capacitive sensor for position tracking of a MOEMS-mirror in a Michelson interferometer setup, 1024611(30 May 2017);doi: 10.1117/12.2264792
Proc. SPIE 10246, Universal and inductorless DC/DC converter for multi-output power supplies in sensor and actuator networks, 1024612(31 May 2017);doi: 10.1117/12.2265188
Poster Session
Proc. SPIE 10246, Anti-collision radio-frequency identification system using passive SAW tags, 1024613(2 June 2017);doi: 10.1117/12.2263223
Proc. SPIE 10246, Mini- and microgenerators applicable in the MEMS technology, 1024614(2 June 2017);doi: 10.1117/12.2263747
Proc. SPIE 10246, Modeling the microstructure of surface by applying BRDF function, 1024616(13 June 2017);doi: 10.1117/12.2264576
Proc. SPIE 10246, Actuation control of a PiezoMEMS biomimetic robotic jellyfish, 1024617(14 June 2017);doi: 10.1117/12.2264605
Proc. SPIE 10246, MEMS-based seed generator applied to a chaotic stream cipher, 1024618(31 May 2017);doi: 10.1117/12.2265003
Proc. SPIE 10246, Analyses of electromagnetic and piezoelectric systems for efficient vibration energy harvesting, 1024619(30 May 2017);doi: 10.1117/12.2265206
Proc. SPIE 10246, Gold/polypyrrole nanorods for gas sensing application, 102461A(9 June 2017);doi: 10.1117/12.2265565
Proc. SPIE 10246, Four segment piezo based micropump, 102461B(7 June 2017);doi: 10.1117/12.2265631
Proc. SPIE 10246, Computational model and simulation for the whispering gallery modes inside micro-optical cavity, 102461C(30 May 2017);doi: 10.1117/12.2265814
Proc. SPIE 10246, Influence of binding material of PZT coating on microresonator's electrical and mechanical properties, 102461E(14 June 2017);doi: 10.1117/12.2265978
Proc. SPIE 10246, Colorimetric sensor for bad odor detection using automated color correction, 102461F(2 June 2017);doi: 10.1117/12.2265990
Proc. SPIE 10246, Temperature simulation at ZnO surface processed by laser interference lithography, 102461G(30 May 2017);doi: 10.1117/12.2266260
Proc. SPIE 10246, Innovative metal thermo-compression wafer bonding for microelectronics and MEMS devices, 102461H(14 June 2017);doi: 10.1117/12.2266492
Proc. SPIE 10246, Characterization of oscillator circuits for monitoring the density-viscosity of liquids by means of piezoelectric MEMS microresonators, 102461I(2 June 2017);doi: 10.1117/12.2266497
Proc. SPIE 10246, Radio link design framework for WSN deployment and performance prediction, 102461J(30 May 2017);doi: 10.1117/12.2265312
Proc. SPIE 10246, User centered integration of Internet of Things devices, 102461K(2 June 2017);doi: 10.1117/12.2265394
Proc. SPIE 10246, Identification of squid species by melting temperature shifts on fluorescence melting curve analysis (FMCA) using single dual-labeled probe, 102461L(2 June 2017);doi: 10.1117/12.2279779
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