A multi-functional MEMS-SPM for quantitative characterization of nano-objects

Zhi Li; Sai Gao; Uwe Brand; Karla Hiller; Nicole Wollschläger; Xianghui Zhang

doi:10.1117/12.2265680

7 June 2017 A multi-functional MEMS-SPM for quantitative characterization of nano-objects

Zhi Li, Sai Gao, Uwe Brand, Karla Hiller, Nicole Wollschläger, Xianghui Zhang

Proceedings Volume 10246, Smart Sensors, Actuators, and MEMS VIII; 102460J (2017) https://doi.org/10.1117/12.2265680
Event: SPIE Microtechnologies, 2017, Barcelona, Spain

Abstract

Based upon the micro-fabrication technology, a series of MEMS scanning probe microscopes (MEMS-SPM) have been developed in the national metrology institute Physikalisch-Technische Bundesanstalt (PTB) in Braunschweig. In comparison with those traditional AFMs, the MEMS-SPM features generally a vertical deflection up to 10 μm with a resolution of 0.2 nm, a non-linearity less than 0.03%, and a testing force up to several hundreds of μN with a force resolution down to 1 nN by means of a capacitive displacement sensing technique. As a result, these MEMS-SPMs can be successfully applied in the field of nanodimensional and nanomechanical metrology. Mechanical design of the MEMS-SPM is reported in this manuscript. Proof-of-principle measurements using a prototype of the MEMS-SPM are detailed in this manuscript, verifying the capabilities of the MEMS-SPM.

Citation Download Citation

Zhi Li, Sai Gao, Uwe Brand, Karla Hiller, Nicole Wollschläger, and Xianghui Zhang "A multi-functional MEMS-SPM for quantitative characterization of nano-objects", Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII, 102460J (7 June 2017); https://doi.org/10.1117/12.2265680

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