30 May 2017 Topologically optimised flexure hinge based XY stage
Author Affiliations +
Proceedings Volume 10246, Smart Sensors, Actuators, and MEMS VIII; 1024607 (2017); doi: 10.1117/12.2267398
Event: SPIE Microtechnologies, 2017, Barcelona, Spain
Abstract
The purpose of this study is to develop a millimeter scale two degree of freedom planar actuation mechanism (XY stage) with flexure hinges that can generate micrometer scale motion at high frequencies. To amplify the micro scale motion in X and Y directions, two identical levers are used. According to the analytical and computational results, a prototype is developed for validation. Piezoelectric actuators are used in the system because of their compactness and large force capacity. The levers in the XY stage are topologically optimized so that the first resonance frequency of the system is maximized, which enlarges the operation range of the system.
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Conference Presentation
Adil Han Orta, Evren Samur, Cetin Yilmaz, "Topologically optimised flexure hinge based XY stage", Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII, 1024607 (30 May 2017); doi: 10.1117/12.2267398; http://dx.doi.org/10.1117/12.2267398
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KEYWORDS
Actuators

Prototyping

Finite element methods

Calibration

Microsystems

Modeling and simulation

Resonators

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