Topologically optimised flexure hinge based XY stage

Adil Han Orta; Evren Samur; Cetin Yilmaz

doi:10.1117/12.2267398

30 May 2017 Topologically optimised flexure hinge based XY stage

Adil Han Orta, Evren Samur, Cetin Yilmaz

Proceedings Volume 10246, Smart Sensors, Actuators, and MEMS VIII; 1024607 (2017) https://doi.org/10.1117/12.2267398
Event: SPIE Microtechnologies, 2017, Barcelona, Spain

Abstract

The purpose of this study is to develop a millimeter scale two degree of freedom planar actuation mechanism (XY stage) with flexure hinges that can generate micrometer scale motion at high frequencies. To amplify the micro scale motion in X and Y directions, two identical levers are used. According to the analytical and computational results, a prototype is developed for validation. Piezoelectric actuators are used in the system because of their compactness and large force capacity. The levers in the XY stage are topologically optimized so that the first resonance frequency of the system is maximized, which enlarges the operation range of the system.

Conference Presentation

Citation Download Citation

Adil Han Orta, Evren Samur, and Cetin Yilmaz "Topologically optimised flexure hinge based XY stage", Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII, 1024607 (30 May 2017); https://doi.org/10.1117/12.2267398

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