Gravimetric humidity sensor based on ZnO nanorods covered piezoresistive Si microcantilever

Jiushuai Xu; Maik Bertke; Xiaojing Li; Alaaeldin Gad; Hao Zhou; Hutomo Suryo Wasisto; Erwin Peiner

doi:10.1117/12.2264897

13 June 2017 Gravimetric humidity sensor based on ZnO nanorods covered piezoresistive Si microcantilever

Jiushuai Xu, Maik Bertke, Xiaojing Li, Alaaeldin Gad, Hao Zhou, Hutomo Suryo Wasisto, Erwin Peiner

Proceedings Volume 10246, Smart Sensors, Actuators, and MEMS VIII; 102460C (2017) https://doi.org/10.1117/12.2264897
Event: SPIE Microtechnologies, 2017, Barcelona, Spain

Abstract

A ZnO nanorods film covered silicon resonant cantilever sensor is developed for atmosphere humidity detection by monitoring the resonant frequency shifts induced by the additional weight of adsorbed water molecules. Two different crystalline seed-layer deposition methods were applied to grow different nanorods films. The morphology of the ZnO films were characterized and the sensor sensitivities were measured under different relative humidity (RH) levels. The experiments results showed that this novel humidity sensor with ZnO nanorods has a sensitivity of 101.5 ± 12.0 ppm/RH% (amount of adsorbed water of 36.9 ± 4.4 ng/RH%), indicating its potential for portable sensing applications.

Conference Presentation

Citation Download Citation

Jiushuai Xu, Maik Bertke, Xiaojing Li, Alaaeldin Gad, Hao Zhou, Hutomo Suryo Wasisto, and Erwin Peiner "Gravimetric humidity sensor based on ZnO nanorods covered piezoresistive Si microcantilever", Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII, 102460C (13 June 2017); https://doi.org/10.1117/12.2264897

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available