2 June 2017 Alkaline fuel cell with nitride membrane
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Abstract
The aim of this work is to fabricate patterned nitride membranes with Si-MEMS-technology as a platform to build up new membrane-electrode-assemblies (MEA) for alkaline fuel cell applications. Two 6-inch wafer processes based on chemical vapor deposition (CVD) were developed for the fabrication of separated nitride membranes with a nitride thickness up to 1 μm. The mechanical stability of the perforated nitride membrane has been adjusted in both processes either by embedding of subsequent ion implantation step or by optimizing the deposition process parameters. A nearly 100% yield of separated membranes of each deposition process was achieved with layer thickness from 150 nm to 1 μm and micro-channel pattern width of 1μm at a pitch of 3 μm. The process for membrane coating with electrolyte materials could be verified to build up MEA. Uniform membrane coating with channel filling was achieved after the optimization of speed controlled dip-coating method and the selection of dimethylsulfoxide (DMSO) as electrolyte solvent. Finally, silver as conductive material was defined for printing a conductive layer onto the MEA by Ink-Technology. With the established IR-thermography setup, characterizations of MEAs in terms of catalytic conversion were performed successfully. The results of this work show promise for build up a platform on wafer-level for high throughput experiments.
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Shen-Huei Sun, Shen-Huei Sun, Moritz Pilaski, Moritz Pilaski, Jens Wartmann, Jens Wartmann, Florian Letzkus, Florian Letzkus, Benedikt Funke, Benedikt Funke, Georg Dura, Georg Dura, Angelika Heinzel, Angelika Heinzel, } "Alkaline fuel cell with nitride membrane", Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII, 102460T (2 June 2017); doi: 10.1117/12.2265689; https://doi.org/10.1117/12.2265689
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