31 May 2017 Programmable differential capacitance-to-voltage converter for MEMS accelerometers
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Abstract
Capacitive MEMS sensors exhibit an excellent noise performance, high sensitivity and low power consumption. They offer a huge range of applications, being the accelerometer one of its main uses. In this work, we present the design of a capacitance-to-voltage converter in CMOS technology to measure the acceleration from the capacitance variations. It is based on a low-power, fully-differential transimpedance amplifier with low input impedance and a very low input noise.
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G. Royo, C. Sánchez-Azqueta, C. Gimeno, C. Aldea, S. Celma, "Programmable differential capacitance-to-voltage converter for MEMS accelerometers", Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII, 1024610 (31 May 2017); doi: 10.1117/12.2264784; https://doi.org/10.1117/12.2264784
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