Mini- and microgenerators applicable in the MEMS technology

P. Fiala; Z. Szabo; P. Marcon; Z. Roubal

doi:10.1117/12.2263747

2 June 2017 Mini- and microgenerators applicable in the MEMS technology

P. Fiala, Z. Szabo, P. Marcon, Z. Roubal

Proceedings Volume 10246, Smart Sensors, Actuators, and MEMS VIII; 1024614 (2017) https://doi.org/10.1117/12.2263747
Event: SPIE Microtechnologies, 2017, Barcelona, Spain

Abstract

The article presents certain general conclusions obtained from an investigation of a vibration-powered milli- or microgenerator functioning as a harvester. In this context, the authors summarize the parameters that are critical in designing optimal generators to retrieve the residual energy contained in an electromechanical system and transferred through the vibrations of an independent structure. The discussion exploits our previous results, which theoretically define the properties characterizing the models of individual basic configurations of a generator based on Faraday’s law of induction.

Citation Download Citation

P. Fiala, Z. Szabo, P. Marcon, and Z. Roubal "Mini- and microgenerators applicable in the MEMS technology", Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII, 1024614 (2 June 2017); https://doi.org/10.1117/12.2263747

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