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7 June 2017 Four segment piezo based micropump
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Proceedings Volume 10246, Smart Sensors, Actuators, and MEMS VIII; 102461B (2017)
Event: SPIE Microtechnologies, 2017, Barcelona, Spain
In recent years, micropumps have been investigated by various researchers as drug delivery and disease diagnostic devices. Many of these micropumps have been designed, considering available micro fabrication technologies rather than appropriate pump performance analysis. Piezoelectric based micro pumps are more popular as compared to other smart materials being explored. In this paper, four segment piezoelectric bimorph actuator (FSPB) are compared with circular disc piezoelectric bimorph actuator (CDPB) based pump. The static and transient behaviors under various electric fields have been analyzed by using ANSYS 12.1(R) finite element software. Simulation results show that dividing the actuator in segment can amplify the deflection and improve the performance of the pump.
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Rakesh Kumar Haldkar, Tanuja Sheorey, Vijay Kumar Gupta, and M. Zahid Ansari "Four segment piezo based micropump", Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII, 102461B (7 June 2017);

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