14 June 2017 Influence of binding material of PZT coating on microresonator's electrical and mechanical properties
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Abstract
Microresonators are fundamental components integrated in hosts of MEMS applications: covering the automotive sector, the telecommunication industry, electronic equipment for surface/material characterization and motion sensing, and etc. The aim of this paper is to investigate the mechanical and electrical properties of PZT film fabricated with three binding materials: polyvinyl butyral (PVB), polymethyl methacrylate (PMMA) and polystyrene (PS) and to evaluate applicability in control of microresonators Q factor. Micro particles of PZT powder were mixed with 20% solution of PVB, PMMA and PS in benzyl alcohol. For investigation of mechanical and electrical properties multilayer cantilevers were made. Obtained PZT and polymer paste was screen printed on copper (thickness 40 μm) using polyester monofilament screen meshes (layer thickness 50 μm) and dried for 30 min at 100°C. Electric dipoles of the PZT particles in composite material were aligned using high voltage generator (5 kV) and a custom–made holder. Electric field was held for 30 min. Surfaces of the applied films were investigated by Atomic Force Microscope NanoWizard(R)3 NanoScience. Dynamic and electrical characteristics of the multilayer were investigated using laser triangular displacement sensor LK-G3000. The measured vibration amplitude and generated electrical potential was collected with USB oscilloscope PicoScope 3424. As the results showed, these cantilevers were able to transform mechanical strain energy into electric potential and, v.v. However, roughness of PZT coatings with PMMA and PS were higher, what could be the reason of the worse quality of the top electrode. However, the main advantage of the created composite piezoelectric material is the possibility to apply it on any uniform or non-uniform vibrating surface and to transform low frequency vibrations into electricity.
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Giedrius Janusas, Giedrius Janusas, Asta Guobiene, Asta Guobiene, Arvydas Palevicius, Arvydas Palevicius, Alfredas Brunius, Alfredas Brunius, Elingas Cekas, Elingas Cekas, Valentinas Baltrusaitis, Valentinas Baltrusaitis, Rokas Sakalys, Rokas Sakalys, } "Influence of binding material of PZT coating on microresonator's electrical and mechanical properties", Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII, 102461E (14 June 2017); doi: 10.1117/12.2265978; https://doi.org/10.1117/12.2265978
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