Large-area fabrication of silicon nanostructures by templated nanoparticle arrays

Gerry Hamdana; Maik Bertke; Tobias Südkamp; Hartmut Bracht; Hutomo Suryo Wasisto; Hutomo Suryo Wasisto; Erwin Peiner

doi:10.1117/12.2264995

30 May 2017 Large-area fabrication of silicon nanostructures by templated nanoparticle arrays

Gerry Hamdana, Maik Bertke, Tobias Südkamp, Hartmut Bracht, Hutomo Suryo Wasisto, Hutomo Suryo Wasisto, Erwin Peiner

Proceedings Volume 10248, Nanotechnology VIII; 1024808 (2017) https://doi.org/10.1117/12.2264995
Event: SPIE Microtechnologies, 2017, Barcelona, Spain

Abstract

An improved nanoscale processing technique by using polystyrene (PS) nanoparticles as a mask is successfully implemented to produce vertically aligned silicon nanowire (SiNW) arrays. Lithographic microstructures with different shapes and opening sizes were applied to determine the fabrication area followed by deposition of a PSS/PDDA/PSS layer. Therefore, most of the substrate areas were covered and a large-range order of PS nanoparticles can be acquired by detailed investigation of spin-coating parameters and surface properties. Afterwards, the particle size was modulated resulting in feature diameters ranging from 459 ± 9 nm down to 248 ± 11 nm. Using this as a mask for inductively coupled plasma (ICP) cryogenic dry etching, a feature-size variation of high-density SiNWs from 225 ± 18 nm to 146 ± 7 nm can be achieved. Finally, a method with simple patterning steps has been developed and tested on more than 100 samples emerging as an alternative method for reliable nanostructure realization.

Citation Download Citation

Gerry Hamdana, Maik Bertke, Tobias Südkamp, Hartmut Bracht, Hutomo Suryo Wasisto, Hutomo Suryo Wasisto, and Erwin Peiner "Large-area fabrication of silicon nanostructures by templated nanoparticle arrays", Proc. SPIE 10248, Nanotechnology VIII, 1024808 (30 May 2017); https://doi.org/10.1117/12.2264995

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KEYWORDS

Nanoparticles

Nanostructures

Silicon

Nanolithography

Photomasks

Lithography

Modulation

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