30 May 2017 3D ring resonator prepared by laser lithography embedded in PDMS
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In this paper we demonstrate design and fabrication of two- (2D) and three-dimensional (3D) ring resonators prepared by 3D laser lithography based on two photon polymerization. We used dip-in direct-laser-writing (DLW) optical lithography to fabricate 3D optical structures for optics and optoelectronics. Prepared structures are embedded in polydimethylsiloxane, which is well known silicon elastomer with unique mechanical and optical properties. This polymer structure allows to couple light directly from single mode optical fiber to the ring resonator structure, where polydimethylsiloxane creates cladding. Optical properties of prepared 2D and 3D ring resonators were investigated by measurement of transmission spectral characteristics.
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P. Gaso, P. Gaso, D. Jandura, D. Jandura, D. Pudis, D. Pudis, I. Lettrichová, I. Lettrichová, } "3D ring resonator prepared by laser lithography embedded in PDMS", Proc. SPIE 10249, Integrated Photonics: Materials, Devices, and Applications IV, 102490C (30 May 2017); doi: 10.1117/12.2265559; https://doi.org/10.1117/12.2265559

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