30 May 2017 Infrared wire-grid polarizer with sol-gel zirconia grating
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Abstract
The infrared wire-grid polarizer consisting of an Al grating, Si, and sol-gel derived zirconia grating film was fabricated by soft imprint process and Al shadow coating processes. A silicone mold was used because of its low surface energy, flexibility, and capability of transferring submicrosized patterns. As a result, the Al grating with a pitch of 400 nm and a depth of 100 nm was obtained on the zirconia grating film. The fabricated polarizer exhibited a polarization function with the TM transmittance greater than that of the Si substrate in the specific wavelength range of 3.6–8.5 μm, because the zirconia film acted as an antireflection film. The maximum value was 63% at a wavelength of 5.2 μm. This increment of the TM transmission spectrum results in interference within the zirconia film. Also, the extinction ratio exceeded almost 20 dB in the 3-8.8 μm wavelength range.
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Itsunari Yamada, Itsunari Yamada, Yoshiro Ishihara, Yoshiro Ishihara, } "Infrared wire-grid polarizer with sol-gel zirconia grating", Proc. SPIE 10249, Integrated Photonics: Materials, Devices, and Applications IV, 102490P (30 May 2017); doi: 10.1117/12.2263544; https://doi.org/10.1117/12.2263544
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