10 February 2017 Study on light scattering characterization for subsurface defect of optical element
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Proceedings Volume 10250, International Conference on Optical and Photonics Engineering (icOPEN 2016); 1025014 (2017) https://doi.org/10.1117/12.2267275
Event: Fourth International Conference on Optical and Photonics Engineering, 2016, Chengdu, China
Abstract
Aiming at the effect of converge laser light scattering caused by subsurface micro-defect, and the change rule of laser scattering modulation was studied. First, the geometry model is built by defect type; then, by finite element method based on electromagnetic theory, the scattering light intensity distribution and variation curve with different detection defect depth, which convergence light spot focus on, were researched by numerical simulation. Finally, simulation model was verified by comparing experiment. This research results are important to setup the mathematical relation between subsurface defect and light scattering, and realize quantitative detection for the subsurface defect of optical element.
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Ailing Tian, Ailing Tian, Yingge Zhang, Yingge Zhang, Yujun Tian, Yujun Tian, Chunhui Wang, Chunhui Wang, Chunyang Wang, Chunyang Wang, } "Study on light scattering characterization for subsurface defect of optical element", Proc. SPIE 10250, International Conference on Optical and Photonics Engineering (icOPEN 2016), 1025014 (10 February 2017); doi: 10.1117/12.2267275; https://doi.org/10.1117/12.2267275
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