Surface quality inspection of laser gyro mirrors using digital holographic microscopy

Lizi Yang; Feng Pan; Wen Xiao; Runyu Cao

doi:10.1117/12.2267106

10 February 2017 Surface quality inspection of laser gyro mirrors using digital holographic microscopy

Lizi Yang, Feng Pan, Wen Xiao, Runyu Cao

Proceedings Volume 10250, International Conference on Optical and Photonics Engineering (icOPEN 2016); 102501O (2017) https://doi.org/10.1117/12.2267106
Event: Fourth International Conference on Optical and Photonics Engineering, 2016, Chengdu, China

Abstract

In the development and production process of laser gyros, reflective mirrors have always been a core component, as they are directly related to the performance of laser gyros. Besides, surface profile deviation and surface defects of mirrors may lead to irreversible serious damages to gyros. In order to achieve effective three-dimensional (3D) quantitative measurements of their surface profiles and defects, we adopt digital holographic microscopy (DHM). Using a DHM system with multiple magnifications and the aberration compensation method, we obtained 3D profile images and estimated the precise quantitative sizes of not only a profile with an aperture of 6.41 mm and a curvature radius of 8.39 m, but also a scratch with a line-equivalent width of 0.45μm and an equivalent depth of 137.28 nm and a pit with an equivalent diameter of 0.86μm and an equivalent depth of 42.95 nm. These results demonstrate that the method is feasible and effective to meet the requirements of engineering practice.

Citation Download Citation

Lizi Yang, Feng Pan, Wen Xiao, and Runyu Cao "Surface quality inspection of laser gyro mirrors using digital holographic microscopy", Proc. SPIE 10250, International Conference on Optical and Photonics Engineering (icOPEN 2016), 102501O (10 February 2017); https://doi.org/10.1117/12.2267106

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